Conductive Remnant(Particles) Reduction:
| Frame | Frame Cassette | Particle Element |
|---|---|---|
| SUS-frame | AI-cassette | Fe, Cr, AI |
| Lightframe | AI-cassette | Resin, Fe, Cr |
| SUS-frame | Lightcassette | Resin, Fe, Cr |
| Lightframe | Lightcassette | Resin |
Particle
Product List:
| Product code and name | Wafer size | External diameter | Internal diameter | Width | Thickness | Remarks |
|---|---|---|---|---|---|---|
| 300LF-EP | 300mm wafer | 400mm | 350mm | 380mm | 2.5mm | Bar-code label type |
| 200LF-FF | 8inch wafer | 296mm | 250mm | 276mm | 2.0mm | Full flat type |
| 200LF-EP | 8inch wafer | 296mm | 250mm | 276mm | 2.0mm | Bar-code label type |
| 150LF-FF | 6inch wafer | 228mm | 194mm | 212mm | 1.5mm | Full flat type |









